Journal of vacuum science & technology. B, microelectronics and nanometer structures : processing, measurement and phenomena

Library: Biblioteche UniTrento, BUP. Biblioteca Universitaria Povo, via Sommarive 5, Povo di Trento

Continues: Journal of vacuum science & technology. B, microelectronics processing
Notes: Lacuna cartacea 2008-2013

Paper (and/or DVD, CD-ROM, microfilm ecc.)

Available from 1991 to 2016
ISSN: 0734-211X

Online

Article full text from 1983

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