Journal of vacuum science & technology. B, microelectronics and nanometer structures : processing, measurement and phenomena

Library: Biblioteche UniTrento
BUP. Biblioteca Universitaria Povo
via Sommarive 5, Povo di Trento

Year Volume Number Holdings
2016 34 6 November/December Yes
2016 34 5 September/October Yes
2016 34 4 July/August Yes
2016 34 3 May/June. - Special Issue on Secondary Ion Mass Spectrometry (SIMS) Yes
2016 34 2 March/April Yes
2016 34 1 January/February Yes
2015 33 6 November/December Yes
2015 33 5 September/October Yes
2015 33 4 July/August Yes
2015 33 3 May/June Yes
2015 33 2 March/April Yes
2015 33 1 January/February Yes
2014 32 6 November/December Yes
2014 32 5 September/October Yes
2014 32 4 July/August Yes
2014 32 3 May/June. - High-k Dielectrics Yes
2014 32 2 March/April Yes
2014 32 1 January/February Yes
2008-2013 26-31 1 -6 No
2007 25 6 Yes
2007 25 5 Yes
2007 25 4 Yes
2007 25 3 Yes
2007 25 2 Yes
2007 25 1 Yes
2006 24 6 Yes
2006 24 5 Yes
2006 24 4 Yes
2006 24 3 Yes
2006 24 2 Yes
2006 24 1 Yes
2005 23 6 Yes
2005 23 5 Yes
2005 23 4 Yes
2005 23 3 Yes
2005 23 2 Yes
2005 23 1 Yes
2004 22 6 Yes
2004 22 5 Yes
2004 22 4 Yes
2004 22 3 Yes
2004 22 2 Yes
2004 22 1 Yes
2003 21 6 Yes
2003 21 5 suppl. Yes
2003 21 5 Yes
2003 21 4 Yes
2003 21 3 Yes
2003 21 2 Yes
2003 21 1 Yes
2002 20 6 Yes
2002 20 5 Yes
2002 20 4 Yes
2002 20 3 Yes
2002 20 2 Yes
2002 20 1 Yes
2001 19 1 -6 Yes
2000 18 1 -6 Yes
1996-1999 14-17 1 -6 Yes
1991-1995 9-13 1 -6 Yes