Journal of vacuum science & technology. B, microelectronics processing and phenomena

Library: Biblioteche UniTrento, BUP. Biblioteca Universitaria Povo, via Sommarive 5, Povo di Trento

Continued by: Journal of vacuum science & technology. B, Microelectronics and nanometer
Notes: Continuazione parziale di: THE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY

Paper (and/or DVD, CD-ROM, microfilm ecc.)

Available from 1983 to 1990
ISSN: 0734-211X

Online

Article full text from 1999

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