Journal of vacuum science & technology. B, microelectronics processing and phenomena
Library: Biblioteche UniTrento, BUP. Biblioteca Universitaria Povo, via Sommarive 5, Povo di Trento
Continued by: Journal of vacuum science & technology. B, Microelectronics and nanometerNotes: Continuazione parziale di: THE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY
Paper (and/or DVD, CD-ROM, microfilm ecc.)
Available from 1983 to 1990ISSN: 0734-211X